Patent Application
Utility
App. No. 09/940,881
· Confirmation No. 6927
METHOD FOR POLISHING A SEMICONDUCTOR SUBSTRATE MEMBER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-30 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-08-29 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-08-29 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-29 | SPEC |
Specification | 20 | View | |
| 2001-08-29 | CLM |
Claims | 3 | View | |
| 2001-08-29 | ABST |
Abstract | 1 | View | |
| 2001-08-29 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-08-29 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Katsuhiro Ota
Yokohama, JAPAN
Akio Saito
Fujisawa, JAPAN
Attorneys & Agents of Record
Classification
USPC
451/41
H10P95/062
C09G1/02
B24B37/044
C09K3/1463
C09K3/1472
Prosecution
- Examiner
- GRANT, ALVIN J
- Art Unit
- 3723
- Customer No.
- 20457
- Docket No.
- 566.39818VX1
- Confirmation No.
- 6927
Foreign Priority
00-164650
·
2000-06-01
·
JAPAN
Publication
- Pub. No.
- US20020090894A1
- Pub. Date
- 2002-07-11
Patent Term Adjustment
-90days
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Quick Facts
- App. No.
- 09/940,881
- Filed
- 2001-08-29
- Granted
- 2003-12-02
- Pub. No.
- US20020090894A1
- Examiner
- GRANT, ALVIN J
- Art Unit
- 3723
- PTA
- -90 days
External Links