Patent Application
Utility
App. No. 09/943,045
· Confirmation No. 9905
CVD METHOD FOR PRODUCING AN INTERCONNECTION FILM BY DEPOSITING A LOWER LAYER TO FILL A RECESS PERFORMING A CLEANING STEP TO REMOVE DISSOCIATED REACTANT GAS, AND CONSEQUENTLY DEPOSITING AN UPPER LAYER THAT HAS A SMALLER IMPURITY CONCENTRATION THAN THE LOWER LAYER
Inventor:
Kazunori Matsuura
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-30 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-08-30 | SPEC |
Specification | 14 | View | |
| 2001-08-30 | CLM |
Claims | 5 | View | |
| 2001-08-30 | ABST |
Abstract | 1 | View | |
| 2001-08-30 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-08-30 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Kazunori Matsuura
Yamagata-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/652
H10P14/43
H10P14/40
H10W20/056
Y10S438/913
Prosecution
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- Customer No.
- 23389
- Docket No.
- 12518Z
- Confirmation No.
- 9905
Foreign Priority
10-065781
·
1998-03-16
·
JAPAN
Publication
- Pub. No.
- US20020045334A1
- Pub. Date
- 2002-04-18
Patent Term Adjustment
-78days
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-19
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Quick Facts
- App. No.
- 09/943,045
- Filed
- 2001-08-30
- Granted
- 2002-12-24
- Pub. No.
- US20020045334A1
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- PTA
- -78 days
External Links