Granted Patent
Utility
US 6,390,910
· Confirmation No. 1065
METHOD AND APPARATUS FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC SUBSTRATES
Inventor:
Scott E. Moore
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-29 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-29 | ADS |
Application Data Sheet | 2 | View | |
| 2001-08-29 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-08-29 | SPEC |
Specification | 14 | View | |
| 2001-08-29 | CLM |
Claims | 17 | View | |
| 2001-08-29 | ABST |
Abstract | 1 | View | |
| 2001-08-29 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-08-29 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-08-29 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Scott E. Moore
Meridian, ID
Attorneys & Agents of Record
Classification
USPC
451/36
H10P52/00
B24B37/26
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Customer No.
- 27076
- Docket No.
- 500390.11
- Confirmation No.
- 1065
Publication
- Pub. No.
- US20020031984A1
- Pub. Date
- 2002-03-14
Patent Term Adjustment
-57days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,390,910
- App. No.
- 09/944,257
- Filed
- 2001-08-29
- Granted
- 2002-05-21
- Pub. No.
- US20020031984A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -57 days
External Links