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App. No. 09/944,798 · Confirmation No. 2684

METHOD AND APPARATUS FOR PLANARIZING AND CLEANING MICROELECTRONIC SUBSTRATES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-08-10 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-01-04 TRNA Transmittal of New Application 2 View
2002-01-04 DRW Drawings-only black and white line drawings 7 View
2001-08-29 TRNA Transmittal of New Application 3 View
2001-08-29 ADS Application Data Sheet 2 View
2001-08-29 A.PE Preliminary Amendment 2 View
2001-08-29 SPEC Specification 13 View
2001-08-29 CLM Claims 16 View
2001-08-29 ABST Abstract 1 View
2001-08-29 DRW Drawings-only black and white line drawings 7 View
2001-08-29 OATH Oath or Declaration filed 12 View
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Quick Facts
App. No.
09/944,798
Filed
2001-08-29
Granted
2004-11-16
Pub. No.
US20020045409A1
Art Unit
3723
PTA
0 days