Granted Patent
Utility
US 6,576,538
· Confirmation No. 2447
TECHNIQUE FOR HIGH EFFICIENCY METALORGANIC CHEMICAL VAPOR DEPOSITION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-06-27 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2005-12-08 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-08-30 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-30 | SPEC |
Specification | 16 | View | |
| 2001-08-30 | CLM |
Claims | 8 | View | |
| 2001-08-30 | ABST |
Abstract | 1 | View | |
| 2001-08-30 | DRW |
Drawings-only black and white line drawings | 6 | View |
Attorneys & Agents of Record
Classification
USPC
438/597
C23C16/45523
H10D1/694
C23C16/18
Prosecution
- Examiner
- TRINH, MICHAEL MANH
- Art Unit
- 2822
- Customer No.
- 20995
- Docket No.
- MICRON.140A
- Confirmation No.
- 2447
Publication
- Pub. No.
- US20030049932A1
- Pub. Date
- 2003-03-13
Patent Term Adjustment
-119days
Child
is a Division of
→
App. 10/234,729
· US 6,676,756
Filed 2002-08-30
· Patented Case
Child
is a Division of
→
App. 10/756,222
· US 7,214,618
Filed 2004-01-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 10/757,638
· US 6,921,710
Filed 2004-01-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 11/146,953
Filed 2005-06-07
· Expressly Abandoned -- During Examination
RELEASE OF SECURITY INTEREST
Recorded 2019-11-12
RELEASE OF SECURITY INTEREST
Recorded 2019-10-09
RELEASE OF SECURITY INTEREST
Recorded 2018-08-23
SECURITY INTEREST
Recorded 2018-07-13
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST.
Recorded 2017-06-08
PATENT SECURITY AGREEMENT
Recorded 2016-06-02
SECURITY INTEREST
Recorded 2016-05-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-28
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Quick Facts
- Patent No.
- US 6,576,538
- App. No.
- 09/945,567
- Filed
- 2001-08-30
- Granted
- 2003-06-10
- Pub. No.
- US20030049932A1
- Examiner
- TRINH, MICHAEL MANH
- Art Unit
- 2822
- PTA
- -119 days
External Links