IP Library › Granted Patent US 6,561,204
Granted Patent Utility
US 6,561,204 · Confirmation No. 4801

APPARATUS AND METHOD FOR CLEANING WAFERS WITH CONTACT HOLES OR VIA HOLES

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 Code Description Pages PDF
2001-09-05 TRNA Transmittal of New Application 3 View
2001-09-05 SPEC Specification 7 View
2001-09-05 CLM Claims 2 View
2001-09-05 ABST Abstract 1 View
2001-09-05 DRW Drawings-only black and white line drawings 4 View
2001-09-05 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,561,204
App. No.
09/945,634
Filed
2001-09-05
Granted
2003-05-13
Pub. No.
US20030042225A1
Art Unit
1746
PTA
0 days