IP Library Granted Patent US 7,497,005
Granted Patent B2
US 7,497,005 · App. 09/946,054 · Granted Mar 3, 2009

Method for forming an inductor

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Quick Facts
Patent No.
US 7,497,005
App. No.
09/946,054
Granted
Mar 3, 2009
Kind
B2
Abstract

A method of fabricating an inductor includes selecting a substrate, depositing a layer of magnetic material on the substrate, depositing an insulating layer on the magnetic material layer, forming a inductor pattern from gold on the insulating layer, depositing a second insulating layer on the inductor pattern, and depositing a second magnetic material layer on the second insulating layer.

Claims (24)

1. A method of fabricating an inductor having an inductance comprising:

selecting a substrate;

depositing a first layer of magnetic material on a surface of the substrate;

depositing a first insulating layer on a surface of the first magnetic material layer;

forming a single inductor pattern on a surface of the first insulating layer, the single inductor pattern formed substantially on a single plane, the single inductor pattern formed from gold;

depositing a second insulating layer on a surface of the single inductor pattern, the second insulating layer encapsulating the single inductor pattern; and

depositing a second magnetic material layer on a surface of the second insulating layer, the second magnetic material layer being deposited to a particular thickness to control the inductance, wherein the single inductive pattern is configured to inductively interact with at most the first layer of magnetic material and the second magnetic material layer to confine a magnetic field generated by the single inductor pattern.

2. The method of claim 1 , wherein the substrate is a semiconductor.

3. The method of claim 1 , wherein the first layer of magnetic material is a ferromagnetic.

4. The method of claim 1 , wherein the first insulating layer is silicon dioxide.

5. The method of claim 1 , wherein the inductor pattern is a square spiral.

6. The method of claim 1 , wherein the inductor pattern is a high-conductivity material.

7. A method of fabricating an inductor having an inductance comprising:

selecting a substrate having a surface;

depositing a first layer of magnetic material to a particular thickness on the surface of the substrate to control the inductance;

depositing a first insulating layer on a surface of the first magnetic material layer;

forming a single inductor pattern on a surface of the first insulating layer, the single inductor pattern formed substantially on a single plane, the single inductor pattern formed from gold;

depositing a second insulating layer on a surface of the single inductor pattern, the second insulating layer encapsulating the single inductor pattern; and

depositing a second magnetic material layer on a surface of the second insulating layer, wherein the single inductor pattern inductively interacts with at most the first layer of magnetic material and the second magnetic material layer to confine a magnetic field generated by the single inductor pattern.

8. The method of claim 7 , wherein the substrate comprises a semiconductor.

9. The method of claim 7 , wherein the first layer of magnetic material comprises a ferromagnetic material.

10. The method of claim 9 , where the ferromagnetic material comprise NiFe.

11. The method of claim 7 , wherein the first insulating layer comprises silicon dioxide.

12. The method of claim 7 , wherein the inductor pattern comprises a triangular spiral.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →