Patent Application
Utility
App. No. 09/951,247
· Confirmation No. 2746
METHODS FOR THE CONTROL OF CONTAMINANTS FOLLOWING CARBON DIOXIDE CLEANING OF MICROELECTRONIC STRUCTURES
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Inventors
Attorneys & Agents of Record
Classification
USPC
134/36
B08B7/0021
H10P70/234
C23G5/00
Y10S134/902
Prosecution
- Examiner
- KORNAKOV, MIKHAIL
- Art Unit
- 1746
- Customer No.
- 20792
- Docket No.
- 5697.45IP4
- Confirmation No.
- 2746
Publication
- Pub. No.
- US20020179126A1
- Pub. Date
- 2002-12-05
Patent Term Adjustment
-188days
Parent
is a Continuation in-part of
→
App. 09/932,063
· US 6,562,146
Filed 2001-08-17
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/269,026
Filed 2001-02-15
· Provisional Application Expired
Child
is a Continuation in-part of
→
App. 10/448,474
· US 6,905,555
Filed 2003-05-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2002/004398
Filed 2002-02-14
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-04-11
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Quick Facts
- App. No.
- 09/951,247
- Filed
- 2001-09-13
- Granted
- 2003-08-05
- Pub. No.
- US20020179126A1
- Examiner
- KORNAKOV, MIKHAIL
- Art Unit
- 1746
- PTA
- -188 days
External Links