Granted Patent
Utility
US 6,562,146
· Confirmation No. 5026
PROCESSES FOR CLEANING AND DRYING MICROELECTRONIC STRUCTURES USING LIQUID OR SUPERCRITICAL CARBON DIOXIDE
Patented Case
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-09-24 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-09-24 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-09-22 | PA.. |
Power of Attorney | 1 | View | |
| 2015-09-22 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2015-09-22 | SES.REQ |
Assertion of entitlement to small entity status | 1 | View | |
| 2015-09-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2003-10-20 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2001-08-17 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-17 | SPEC |
Specification | 19 | View | |
| 2001-08-17 | CLM |
Claims | 6 | View | |
| 2001-08-17 | ABST |
Abstract | 1 | View | |
| 2001-08-17 | DRW |
Drawings-only black and white line drawings | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
134/30
C23G5/00
H10P70/234
B08B7/0021
Y10S134/902
Y10S438/906
Prosecution
- Examiner
- KORNAKOV, MIKHAIL
- Art Unit
- 1746
- Customer No.
- 530
- Confirmation No.
- 5026
Patent Term Adjustment
-74days
Parent
Claims priority from a provisional application
→
App. 60/269,026
Filed 2001-02-15
· Provisional Application Expired
Child
is a Continuation in-part of
→
App. 09/951,247
· US 6,602,351
Filed 2001-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 09/951,249
· US 6,641,678
Filed 2001-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2002/004398
Filed 2002-02-14
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation in-part of
→
App. 10/448,474
· US 6,905,555
Filed 2003-05-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 09/951,259
· US 6,596,093
Filed 2001-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 09/951,092
· US 6,613,157
Filed 2001-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-19
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Quick Facts
- Patent No.
- US 6,562,146
- App. No.
- 09/932,063
- Filed
- 2001-08-17
- Granted
- 2003-05-13
- Examiner
- KORNAKOV, MIKHAIL
- Art Unit
- 1746
- PTA
- -74 days
External Links