IP Library Patent Application 09951259
Patent Application Utility
App. No. 09/951,259 · Confirmation No. 2747

METHODS FOR CLEANING MICROELECTRONIC STRUCTURES WITH CYCLICAL PHASE MODULATION

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2002-04-12 TRNA Transmittal of New Application 4 View
2002-04-12 DRW Drawings-only black and white line drawings 2 View
2002-04-12 OATH Oath or Declaration filed 4 View
2001-09-13 TRNA Transmittal of New Application 3 View
2001-09-13 SPEC Specification 25 View
2001-09-13 CLM Claims 4 View
2001-09-13 ABST Abstract 1 View
2001-09-13 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
09/951,259
Filed
2001-09-13
Granted
2003-07-22
Pub. No.
US20020112747A1
Art Unit
1746
PTA
-182 days