Granted Patent
Utility
US 6,686,099
· Confirmation No. 8756
METHOD OF MANUFACTURING A PHOTOMASK
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-11 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-09-18 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-09-18 | SPEC |
Specification | 52 | View | |
| 2001-09-18 | CLM |
Claims | 7 | View | |
| 2001-09-18 | ABST |
Abstract | 1 | View | |
| 2001-09-18 | DRW |
Drawings-only black and white line drawings | 38 | View | |
| 2001-09-18 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
430/5
H10P76/00
G03F1/72
G03F1/68
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Customer No.
- 38327
- Docket No.
- TSUT.0009
- Confirmation No.
- 8756
Foreign Priority
2000-246506
·
2000-08-15
·
JAPAN
Publication
- Pub. No.
- US20020028395A1
- Pub. Date
- 2002-03-07
Patent Term Adjustment
0days
CHANGE OF ADDRESS
Recorded 2017-11-29
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-11-28
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-09-18
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Quick Facts
- Patent No.
- US 6,686,099
- App. No.
- 09/954,065
- Filed
- 2001-09-18
- Granted
- 2004-02-03
- Pub. No.
- US20020028395A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- 0 days
External Links