IP Library › Patent Application 09956680
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App. No. 09/956,680 · Confirmation No. 2671

Polishing by CMP for optimized planarization

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 Code Description Pages PDF
2001-09-20 TRNA Transmittal of New Application 1 View
2001-09-20 SPEC Specification 7 View
2001-09-20 CLM Claims 2 View
2001-09-20 ABST Abstract 1 View
2001-09-20 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
09/956,680
Filed
2001-09-20
Pub. No.
US20020042199A1
Art Unit
1765