IP Library Granted Patent US 6,500,727
Granted Patent Utility
US 6,500,727 · Confirmation No. 2707

SILICON SHALLOW TRENCH ETCHING WITH ROUND TOP CORNER BY PHOTORESIST-FREE PROCESS

Patented Case View Patent ↗
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Code Description Pages PDF
2001-09-21 TRNA Transmittal of New Application 2 View
2001-09-21 SPEC Specification 10 View
2001-09-21 CLM Claims 11 View
2001-09-21 ABST Abstract 1 View
2001-09-21 DRW Drawings-only black and white line drawings 2 View
2001-09-21 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,500,727
App. No.
09/957,423
Filed
2001-09-21
Granted
2002-12-31
Art Unit
2823
PTA
0 days