IP Library › Patent Application 09958911
Patent Application Utility PCT National Stage
App. No. 09/958,911 · Confirmation No. 5441

METHOD FOR MANUFACTURING SI-SIC MEMBER FOR SEMICONDUCTOR HEAT TREATMENT

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Quick Facts
App. No.
09/958,911
Filed
2001-10-15
Granted
2004-03-02
Art Unit
1763
PTA
0 days