IP Library › Granted Patent US 6,764,925
Granted Patent Utility
US 6,764,925 · Confirmation No. 3794

SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND ELECTRON BEAM EXPOSURE APPARATUS

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2004-06-01 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-05 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-04-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-05 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-05 FWCLM Index of Claims 1 View
2004-02-24 WFEE Fee Worksheet (SB06) 1 View
2004-02-24 FWCLM Index of Claims 1 View
2004-01-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-01-26 SPEC Specification 1 View
2004-01-26 CLM Claims 5 View
2004-01-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-10-20 CTNF Non-Final Rejection 7 View
2003-10-20 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-20 892 List of references cited by examiner 1 View
2003-10-20 FWCLM Index of Claims 1 View
2003-10-20 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-30 SRNT Examiner's search strategy and results 10 View
2003-08-05 ELC. Response to Election / Restriction Filed 2 View
2003-07-10 CTRS Requirement for Restriction/Election 4 View
2002-11-07 C.AD Change of Address 1 View
2002-04-09 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2002-04-09 FOR Foreign Reference 8 View
2002-04-09 FOR Foreign Reference 12 View
2002-04-09 FOR Foreign Reference 24 View
2001-09-26 TRNA Transmittal of New Application 2 View
2001-09-26 ADS Application Data Sheet 2 View
2001-09-26 SPEC Specification 19 View
2001-09-26 CLM Claims 5 View
2001-09-26 ABST Abstract 1 View
2001-09-26 DRW Drawings-only black and white line drawings 4 View
2001-09-26 OATH Oath or Declaration filed 3 View
2001-09-26 TRNA Transmittal of New Application 2 View
2001-09-26 WFEE Fee Worksheet (SB06) 1 View
2001-09-26 WFEE Fee Worksheet (SB06) 1 View
2001-09-26 WCLM Claims Worksheet (PTO-2022) 1 View
2001-09-26 SPEC Specification 19 View
2001-09-26 CLM Claims 5 View
2001-09-26 ABST Abstract 1 View
2001-09-26 OATH Oath or Declaration filed 3 View
2001-09-26 DRW Drawings-only black and white line drawings 4 View
2001-09-26 FRPR Certified Copy of Foreign Priority Application 22 View
2001-09-26 ADS Application Data Sheet 2 View
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Quick Facts
Patent No.
US 6,764,925
App. No.
09/965,409
Filed
2001-09-26
Granted
2004-07-20
Pub. No.
US20020039829A1
Examiner
DANG, PHUC T
Art Unit
2818
PTA
-6 days