Patent Application
Utility
App. No. 09/969,531
· Confirmation No. 9554
METHOD AND SYSTEM TO PROVIDE MATERIAL REMOVAL AND PLANARIZATION EMPLOYING A REACTIVE PAD
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-12-15 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2008-12-01 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2003-08-20 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-10-01 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-10-01 | SPEC |
Specification | 18 | View | |
| 2001-10-01 | CLM |
Claims | 3 | View | |
| 2001-10-01 | ABST |
Abstract | 1 | View | |
| 2001-10-01 | DRW |
Drawings-only black and white line drawings | 5 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/692
B24D13/14
H10W20/062
H10P52/403
H10P95/062
B24B37/042
B24B37/24
B24D3/346
C23F3/00
Prosecution
- Examiner
- ROMAN, ANGEL
- Art Unit
- 2812
- Customer No.
- 83537
- Docket No.
- NVLUS.082A
- Confirmation No.
- 9554
Publication
- Pub. No.
- US20020068456A1
- Pub. Date
- 2002-06-06
Patent Term Adjustment
-80days
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Quick Facts
- App. No.
- 09/969,531
- Filed
- 2001-10-01
- Granted
- 2003-11-18
- Pub. No.
- US20020068456A1
- Examiner
- ROMAN, ANGEL
- Art Unit
- 2812
- PTA
- -80 days
External Links