IP Library Granted Patent US 6,693,716
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Granted Patent Utility
US 6,693,716 · Confirmation No. 5981

METHOD AND APPARATUS FOR OPTICAL MEASUREMENT OF A SURFACE PROFILE OF A SPECIMEN

Inventor: Frank Sieckmann
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Quick Facts
Patent No.
US 6,693,716
App. No.
09/973,983
Filed
2001-10-11
Granted
2004-02-17
Pub. No.
US20020071125A1
Art Unit
2877
PTA
-31 days