Granted Patent
Utility
US 6,568,999
· Confirmation No. 9853
METHOD AND APPARATUS FOR CLEANING A SURFACE OF A MICROELECTRONIC SUBSTRATE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-27 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2001-10-09 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-10-09 | ADS |
Application Data Sheet | 2 | View | |
| 2001-10-09 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-10-09 | SPEC |
Specification | 15 | View | |
| 2001-10-09 | CLM |
Claims | 18 | View | |
| 2001-10-09 | ABST |
Abstract | 1 | View | |
| 2001-10-09 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-10-09 | OATH |
Oath or Declaration filed | 7 | View | |
| 2001-10-09 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
451/65
H10P72/0412
B08B1/14
B08B1/36
Prosecution
- Examiner
- ROSE, ROBERT A
- Art Unit
- 3723
- Customer No.
- 27076
- Docket No.
- 500195.02
- Confirmation No.
- 9853
Publication
- Pub. No.
- US20020028640A1
- Pub. Date
- 2002-03-07
Patent Term Adjustment
-3days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,568,999
- App. No.
- 09/974,343
- Filed
- 2001-10-09
- Granted
- 2003-05-27
- Pub. No.
- US20020028640A1
- Examiner
- ROSE, ROBERT A
- Art Unit
- 3723
- PTA
- -3 days
External Links