Patent Application
Utility
App. No. 09/976,469
· Confirmation No. 9938
CHEMICAL MECHANICAL POLISHING ENDPOINT DETECTION
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-12-15 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2008-12-01 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2005-12-08 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-10-12 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-10-12 | SPEC |
Specification | 17 | View | |
| 2001-10-12 | CLM |
Claims | 9 | View | |
| 2001-10-12 | ABST |
Abstract | 1 | View | |
| 2001-10-12 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Bulent Basol
Manhattan Beach, CA
Homayoun Talleh
San Jose, CA
Attorneys & Agents of Record
Classification
USPC
438/692
Prosecution
- Examiner
- LE, THAO P
- Art Unit
- 2818
- Customer No.
- 83537
- Docket No.
- NVLUS.044A (5233)
- Confirmation No.
- 9938
Publication
- Pub. No.
- US20030073319A1
- Pub. Date
- 2003-04-17
Patent Term Adjustment
-16days
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Quick Facts
- App. No.
- 09/976,469
- Filed
- 2001-10-12
- Granted
- 2003-06-17
- Pub. No.
- US20030073319A1
- Examiner
- LE, THAO P
- Art Unit
- 2818
- PTA
- -16 days
External Links