IP Library Granted Patent US 6,704,920
Granted Patent Utility
US 6,704,920 · Confirmation No. 2178

PROCESS CONTROL FOR MICRO-LITHOGRAPHY

Inventors: Boaz Brill, Yoel Cohen
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Code Description Pages PDF
2008-07-22 PET.AUTO ePetition Request Form 3 View
2008-07-22 WFEE Fee Worksheet (SB06) 2 View
2008-07-22 PET.DEC.AUTO ePetition Grant Letter 1 View
2008-07-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-01-27 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-10-30 TRNA Transmittal of New Application 2 View
2001-10-30 ADS Application Data Sheet 1 View
2001-10-30 SPEC Specification 22 View
2001-10-30 CLM Claims 4 View
2001-10-30 ABST Abstract 1 View
2001-10-30 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
Patent No.
US 6,704,920
App. No.
09/984,640
Filed
2001-10-30
Granted
2004-03-09
Pub. No.
US20020072003A1
Examiner
LIN, SUN J
Art Unit
2825
PTA
-2 days