Granted Patent
Utility
US 6,704,920
· Confirmation No. 2178
PROCESS CONTROL FOR MICRO-LITHOGRAPHY
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-07-22 | PET.AUTO |
ePetition Request Form | 3 | View | |
| 2008-07-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-07-22 | PET.DEC.AUTO |
ePetition Grant Letter | 1 | View | |
| 2008-07-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2004-01-27 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-10-30 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-10-30 | ADS |
Application Data Sheet | 1 | View | |
| 2001-10-30 | SPEC |
Specification | 22 | View | |
| 2001-10-30 | CLM |
Claims | 4 | View | |
| 2001-10-30 | ABST |
Abstract | 1 | View | |
| 2001-10-30 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Boaz Brill
Rishon Lezion, ISRAEL
Yoel Cohen
Ness Ziona, ISRAEL
Attorneys & Agents of Record
Classification
USPC
716/19
G03F7/70491
H10P74/23
G03F7/705
G03F7/70616
Prosecution
- Examiner
- LIN, SUN J
- Art Unit
- 2825
- Customer No.
- 1444
- Docket No.
- BRILL= 1
- Confirmation No.
- 2178
Foreign Priority
139368
·
2000-10-30
·
ISRAEL
Publication
- Pub. No.
- US20020072003A1
- Pub. Date
- 2002-06-13
Patent Term Adjustment
-2days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-01
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,704,920
- App. No.
- 09/984,640
- Filed
- 2001-10-30
- Granted
- 2004-03-09
- Pub. No.
- US20020072003A1
- Examiner
- LIN, SUN J
- Art Unit
- 2825
- PTA
- -2 days
External Links