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App. No. 09/986,044 · Confirmation No. 4807

PLASMA ETCHING APPARATUS WITH FOCUS RING AND PLASMA ETCHING METHOD

Inventor: Osamu Koike
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-03-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-09 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-09 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-09 CLM Claims 2 View
2003-12-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-09 FWCLM Index of Claims 1 View
2003-12-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-10-30 CLM Claims 2 View
2003-10-30 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-08-06 CTNF Non-Final Rejection 5 View
2003-08-06 892 List of references cited by examiner 1 View
2003-08-06 1449 List of References cited by applicant and considered by examiner 1 View
2003-08-01 SRNT Examiner's search strategy and results 2 View
2003-07-03 ELC. Response to Election / Restriction Filed 3 View
2003-06-10 CTRS Requirement for Restriction/Election 4 View
2003-02-05 C.AD Change of Address 1 View
2002-09-16 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-09-16 1449 List of References cited by applicant and considered by examiner 1 View
2002-09-16 FOR Foreign Reference 9 View
2002-09-16 FOR Foreign Reference 7 View
2002-09-16 FOR Foreign Reference 13 View
2001-11-07 TRNA Transmittal of New Application 2 View
2001-11-07 ADS Application Data Sheet 3 View
2001-11-07 SPEC Specification 9 View
2001-11-07 CLM Claims 2 View
2001-11-07 ABST Abstract 1 View
2001-11-07 DRW Drawings-only black and white line drawings 2 View
2001-11-07 OATH Oath or Declaration filed 3 View
2001-11-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-07 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-07 FWCLM Index of Claims 1 View
2001-11-07 TRNA Transmittal of New Application 2 View
2001-11-07 DRW Drawings-only black and white line drawings 2 View
2001-11-07 SPEC Specification 9 View
2001-11-07 CLM Claims 2 View
2001-11-07 ABST Abstract 1 View
2001-11-07 OATH Oath or Declaration filed 3 View
2001-11-07 WFEE Fee Worksheet (SB06) 1 View
2001-11-07 WFEE Fee Worksheet (SB06) 1 View
2001-11-07 WCLM Claims Worksheet (PTO-2022) 1 View
2001-11-07 FRPR Certified Copy of Foreign Priority Application 18 View
2001-11-07 ADS Application Data Sheet 3 View
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Quick Facts
App. No.
09/986,044
Filed
2001-11-07
Granted
2004-04-27
Pub. No.
US20020072240A1
Art Unit
1763
PTA
0 days