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App. No. 09/986,353 · Confirmation No. 5237

PROJECTION ALIGNER, EXPOSING METHOD AND SEMICONDUCTOR DEVICE

Inventor: Tetsuro Hanawa
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2003-12-29 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2003-12-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-29 FWCLM Index of Claims 1 View
2003-12-29 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-16 A.NE Response After Final Action 1 View
2003-12-16 CLM Claims 5 View
2003-12-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-10-09 CTFR Final Rejection 6 View
2003-10-09 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-09 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2003-10-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-03 SPEC Specification 3 View
2003-09-03 CLM Claims 6 View
2003-09-03 REM Applicant Arguments/Remarks Made in an Amendment 3 View
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2003-06-28 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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2003-06-28 FOR Foreign Reference 5 View
2003-06-28 FOR Foreign Reference 4 View
2003-06-03 CTNF Non-Final Rejection 6 View
2003-06-03 892 List of references cited by examiner 1 View
2003-06-03 1449 List of References cited by applicant and considered by examiner 3 View
2003-05-15 SRNT Examiner's search strategy and results 4 View
2003-05-01 LET. Miscellaneous Incoming Letter 1 View
2003-04-01 CTRS Requirement for Restriction/Election 3 View
2003-02-05 C.AD Change of Address 1 View
2003-01-06 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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2002-09-19 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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2002-09-19 FOR Foreign Reference 4 View
2002-09-19 FOR Foreign Reference 26 View
2001-11-08 TRNA Transmittal of New Application 2 View
2001-11-08 ADS Application Data Sheet 3 View
2001-11-08 A.PE Preliminary Amendment 3 View
2001-11-08 SPEC Specification 18 View
2001-11-08 CLM Claims 5 View
2001-11-08 ABST Abstract 1 View
2001-11-08 DRW Drawings-only black and white line drawings 7 View
2001-11-08 OATH Oath or Declaration filed 3 View
2001-11-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-08 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-08 FWCLM Index of Claims 1 View
2001-11-08 TRNA Transmittal of New Application 2 View
2001-11-08 DRW Drawings-only black and white line drawings 7 View
2001-11-08 SPEC Specification 18 View
2001-11-08 CLM Claims 5 View
2001-11-08 ABST Abstract 1 View
2001-11-08 OATH Oath or Declaration filed 3 View
2001-11-08 ADS Application Data Sheet 3 View
2001-11-08 WFEE Fee Worksheet (SB06) 1 View
2001-11-08 WFEE Fee Worksheet (SB06) 1 View
2001-11-08 WCLM Claims Worksheet (PTO-2022) 1 View
2001-11-08 FRPR Certified Copy of Foreign Priority Application 29 View
2001-11-08 A.PE Preliminary Amendment 1 View
2001-11-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
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Quick Facts
App. No.
09/986,353
Filed
2001-11-08
Granted
2004-05-04
Pub. No.
US20020076628A1
Art Unit
2851
PTA
0 days