Patent Application
Utility
App. No. 09/988,682
· Confirmation No. 9030
CHEMICALLY AMPLIFIED RESIST COMPOSITIONS
Inventor:
Mitsuharu Yamana
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
View Patent ↗
View Publication ↗
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-20 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-11-20 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-11-20 | SPEC |
Specification | 36 | View | |
| 2001-11-20 | CLM |
Claims | 7 | View | |
| 2001-11-20 | ABST |
Abstract | 1 | View | |
| 2001-11-20 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-20 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Mitsuharu Yamana
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/270.1
G03F7/0045
G03F7/0392
G03F7/0397
Y10S430/12
Y10S430/121
Y10S430/122
Y10S430/124
Prosecution
- Examiner
- ASHTON, ROSEMARY E
- Art Unit
- 1752
- Customer No.
- 21254
- Docket No.
- NEC00P042-MS DIV
- Confirmation No.
- 9030
Foreign Priority
11-140249
·
1999-05-20
·
JAPAN
Publication
- Pub. No.
- US20020058203A1
- Pub. Date
- 2002-05-16
Patent Term Adjustment
0days
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-25
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 09/988,682
- Filed
- 2001-11-20
- Granted
- 2002-06-18
- Pub. No.
- US20020058203A1
- Examiner
- ASHTON, ROSEMARY E
- Art Unit
- 1752
- PTA
- 0 days
External Links