IP Library Granted Patent US 6,530,968
Granted Patent Utility
US 6,530,968 · Confirmation No. 9493

CHEMICAL MECHANICAL POLISHING SLURRY

⬇ PDF
Code Description Pages PDF
2001-11-20 TRNA Transmittal of New Application 1 View
2001-11-20 ADS Application Data Sheet 2 View
2001-11-20 SPEC Specification 24 View
2001-11-20 CLM Claims 2 View
2001-11-20 ABST Abstract 1 View
2001-11-20 DRW Drawings-only black and white line drawings 2 View
2001-11-20 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,530,968
App. No.
09/989,021
Filed
2001-11-20
Granted
2003-03-11
Pub. No.
US20020095872A1
Art Unit
1755
PTA
-10 days