Granted Patent
Utility
US 6,567,719
· Confirmation No. 2248
METHOD AND APPARATUS FOR MAKING PHOTOMASKS WITH IMPROVED INSIDE CORNER RESOLUTION
Inventor:
Doug Van Den Broeke
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-20 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-20 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-11-20 | SPEC |
Specification | 11 | View | |
| 2001-11-20 | CLM |
Claims | 15 | View | |
| 2001-11-20 | ABST |
Abstract | 1 | View | |
| 2001-11-20 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-11-20 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Doug Van Den Broeke
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
700/121
G03F1/68
Prosecution
- Examiner
- MAI, RIJUE
- Art Unit
- 2182
- Docket No.
- 67493/20
- Confirmation No.
- 2248
Publication
- Pub. No.
- US20020051913A1
- Pub. Date
- 2002-05-02
Patent Term Adjustment
0days
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2010-02-13
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2008-12-19
from
PHOTRONICS, INC.
SECURITY AGREEMENT
Recorded 2008-12-15
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Quick Facts
- Patent No.
- US 6,567,719
- App. No.
- 09/989,807
- Filed
- 2001-11-20
- Granted
- 2003-05-20
- Pub. No.
- US20020051913A1
- Examiner
- MAI, RIJUE
- Art Unit
- 2182
- PTA
- 0 days
External Links