Granted Patent
Utility
US 6,683,011
· Confirmation No. 6380
PROCESS FOR FORMING HAFNIUM OXIDE FILMS
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-03 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-11-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-11-03 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2003-11-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-10-31 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2001-11-14 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-14 | SPEC |
Specification | 5 | View | |
| 2001-11-14 | CLM |
Claims | 1 | View | |
| 2001-11-14 | ABST |
Abstract | 1 | View | |
| 2001-11-14 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2001-11-14 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Ryan C. Smith
Roseville, MN
Tiezhong Ma
San Jose, CA
Stephen A. Campbell
Shoreview, MN
Wayne L. Gladfelter
Roseville, MN
Attorneys & Agents of Record
Classification
USPC
438/785
H10P14/69392
C23C16/405
H10D64/693
H10P14/6334
H10D64/01344
H10P14/6339
H10P14/668
Prosecution
- Examiner
- PHAM, THANH V
- Art Unit
- 2823
- Customer No.
- 26191
- Docket No.
- 09531-048001
- Confirmation No.
- 6380
Publication
- Pub. No.
- US20030092287A1
- Pub. Date
- 2003-05-15
Patent Term Adjustment
-6days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-05
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Quick Facts
- Patent No.
- US 6,683,011
- App. No.
- 09/992,173
- Filed
- 2001-11-14
- Granted
- 2004-01-27
- Pub. No.
- US20030092287A1
- Examiner
- PHAM, THANH V
- Art Unit
- 2823
- PTA
- -6 days
External Links