Patent Application
Utility
App. No. 09/994,128
· Confirmation No. 7324
SILICON-STARVED PECVD METHOD FOR METAL GATE ELECTRODE DIELECTRIC SPACER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-26 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-11-26 | SPEC |
Specification | 17 | View | |
| 2001-11-26 | CLM |
Claims | 4 | View | |
| 2001-11-26 | ABST |
Abstract | 1 | View | |
| 2001-11-26 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-11-26 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Minh Van Ngo
Fremont, CA
Arvind Halliyal
Cupertino, CA
Attorneys & Agents of Record
Classification
USPC
438/786
H10P14/6336
C23C16/308
H10D64/01318
H10D64/01316
H10P14/6682
H10P14/6927
Prosecution
- Examiner
- OWENS, BETH E
- Art Unit
- 2824
- Customer No.
- 45305
- Docket No.
- G0562
- Confirmation No.
- 7324
Patent Term Adjustment
-84days
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-11-26
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Quick Facts
- App. No.
- 09/994,128
- Filed
- 2001-11-26
- Granted
- 2003-01-21
- Examiner
- OWENS, BETH E
- Art Unit
- 2824
- PTA
- -84 days
External Links