IP Library › Granted Patent US 6,706,142
Granted Patent Utility Small
US 6,706,142 · Confirmation No. 3614

SYSTEMS AND METHODS FOR ENHANCING PLASMA PROCESSING OF A SEMICONDUCTOR SUBSTRATE

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2015-02-10 IMIS Miscellaneous Internal Document 1 View
2004-01-15 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-11-12 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-11-12 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2003-11-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-12 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-19 CLM Claims 5 View
2003-09-19 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-09-19 OATH Oath or Declaration filed 12 View
2003-09-19 DRW Drawings-only black and white line drawings 9 View
2003-09-19 XT/ Extension of Time 2 View
2003-03-21 CTNF Non-Final Rejection 12 View
2003-03-21 892 List of references cited by examiner 1 View
2003-03-21 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-03-12 SRNT Examiner's search strategy and results 2 View
2003-01-07 LET. Miscellaneous Incoming Letter 1 View
2003-01-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-10-07 CTRS Requirement for Restriction/Election 4 View
2002-03-28 LET. Miscellaneous Incoming Letter 3 View
2002-03-28 OATH Oath or Declaration filed 5 View
2002-03-07 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-11-28 TRNA Transmittal of New Application 2 View
2001-11-28 SPEC Specification 26 View
2001-11-28 CLM Claims 3 View
2001-11-28 ABST Abstract 1 View
2001-11-28 DRW Drawings-only black and white line drawings 9 View
2001-11-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-28 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-28 FWCLM Index of Claims 1 View
2001-11-28 TRNA Transmittal of New Application 2 View
2001-11-28 DRW Drawings-only black and white line drawings 9 View
2001-11-28 SPEC Specification 26 View
2001-11-28 CLM Claims 3 View
2001-11-28 ABST Abstract 1 View
2001-11-28 WFEE Fee Worksheet (SB06) 1 View
2001-11-28 WFEE Fee Worksheet (SB06) 1 View
2001-11-28 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,706,142
App. No.
09/997,158
Filed
2001-11-28
Granted
2004-03-16
Pub. No.
US20020096258A1
Art Unit
1763
PTA
-90 days