IP Library Patent Application 09997393
Patent Application Utility
App. No. 09/997,393 · Confirmation No. 5983

INTEGRATED ION IMPLANT SCRUBBER SYSTEM

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
Code Description Pages PDF
2001-11-29 TRNA Transmittal of New Application 3 View
2001-11-29 SPEC Specification 22 View
2001-11-29 CLM Claims 1 View
2001-11-29 ABST Abstract 1 View
2001-11-29 DRW Drawings-only black and white line drawings 5 View
2001-11-29 OATH Oath or Declaration filed 8 View
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Quick Facts
App. No.
09/997,393
Filed
2001-11-29
Granted
2003-04-01
Pub. No.
US20020092421A1
Art Unit
1724
PTA
-127 days