IP Library Granted Patent US 6,664,584
Granted Patent Utility
US 6,664,584 · Confirmation No. 6338

METAL OXYNITRIDE CAPACITOR BARRIER LAYER

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Code Description Pages PDF
2003-10-27 IFEE Issue Fee Payment (PTO-85B) 2 View
2001-11-30 TRNA Transmittal of New Application 1 View
2001-11-30 SPEC Specification 22 View
2001-11-30 CLM Claims 9 View
2001-11-30 ABST Abstract 1 View
2001-11-30 DRW Drawings-only black and white line drawings 15 View
2001-11-30 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,664,584
App. No.
09/999,281
Filed
2001-11-30
Granted
2003-12-16
Pub. No.
US20020113280A1
Art Unit
2824
PTA
-13 days