Granted Patent
Utility
US 6,544,859
· Confirmation No. 8338
SEMICONDUCTOR PROCESSING METHODS AND STRUCTURES FOR DETERMINING ALIGNMENT DURING SEMICONDUCTOR WAFER PROCESSING
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-11-01 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-01 | A.PE |
Preliminary Amendment | 43 | View | |
| 2001-11-01 | SPEC |
Specification | 19 | View | |
| 2001-11-01 | CLM |
Claims | 15 | View | |
| 2001-11-01 | ABST |
Abstract | 1 | View | |
| 2001-11-01 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2001-11-01 | OATH |
Oath or Declaration filed | 5 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/401
G03F7/70633
H10P74/277
Y10S148/102
Y10S438/975
Prosecution
- Examiner
- BROPHY, JAMIE LYNN
- Art Unit
- 2822
- Docket No.
- PHA 50932 A
- Confirmation No.
- 8338
Publication
- Pub. No.
- US20020048922A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-09-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-10-28
CHANGE OF NAME
Recorded 2006-12-22
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Quick Facts
- Patent No.
- US 6,544,859
- App. No.
- 10/003,130
- Filed
- 2001-11-01
- Granted
- 2003-04-08
- Pub. No.
- US20020048922A1
- Examiner
- BROPHY, JAMIE LYNN
- Art Unit
- 2822
- PTA
- 0 days
External Links