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App. No. 10/005,861 · Confirmation No. 2803

Low k dielectric film deposition process

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2005-06-24 ABN Abandonment 2 View
2005-02-04 CTAV Advisory Action (PTOL-303) 5 View
2005-02-04 1449 List of References cited by applicant and considered by examiner 1 View
2005-02-04 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-01-04 A.NE Response After Final Action 3 View
2005-01-04 CLM Claims 3 View
2005-01-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-01-04 AF/D Affidavit-submitted prior to Mar 15, 2013 2 View
2005-01-04 AF/D Affidavit-submitted prior to Mar 15, 2013 8 View
2005-01-04 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-01-04 WFEE Fee Worksheet (SB06) 1 View
2005-01-04 FWCLM Index of Claims 1 View
2004-10-08 CTFR Final Rejection 10 View
2004-10-08 892 List of references cited by examiner 1 View
2004-10-08 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-08-03 CLM Claims 4 View
2004-08-03 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-08-03 LET. Miscellaneous Incoming Letter 1 View
2004-08-03 WFEE Fee Worksheet (SB06) 1 View
2004-08-03 WCLM Claims Worksheet (PTO-2022) 1 View
2004-05-04 CTNF Non-Final Rejection 7 View
2004-05-04 892 List of references cited by examiner 1 View
2004-05-04 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-12 LET. Miscellaneous Incoming Letter 1 View
2004-04-12 RCEX Request for Continued Examination (RCE) 1 View
2004-04-09 CTAV Advisory Action (PTOL-303) 4 View
2004-04-09 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-03-18 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 3 View
2004-03-18 CLM Claims 4 View
2004-03-18 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-03-18 LET. Miscellaneous Incoming Letter 1 View
2004-01-20 CTFR Final Rejection 9 View
2004-01-20 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-19 DIST Terminal Disclaimer Filed 1 View
2003-11-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-11-12 CLM Claims 4 View
2003-11-12 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-11-12 DIST Terminal Disclaimer Filed 2 View
2003-09-22 CTNF Non-Final Rejection 8 View
2003-09-22 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-22 892 List of references cited by examiner 1 View
2003-09-22 FWCLM Index of Claims 1 View
2003-09-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-15 SRNT Examiner's search strategy and results 3 View
2002-01-23 NDRW Transmittal Letter accompanying New/Additional Drawings 1 View
2002-01-23 DRW Drawings-only black and white line drawings 4 View
2001-11-08 TRNA Transmittal of New Application 4 View
2001-11-08 SPEC Specification 13 View
2001-11-08 CLM Claims 4 View
2001-11-08 ABST Abstract 1 View
2001-11-08 DRW Drawings-only black and white line drawings 4 View
2001-11-08 OATH Oath or Declaration filed 12 View
2001-11-08 LET. Miscellaneous Incoming Letter 1 View
2001-11-08 WFEE Fee Worksheet (SB06) 1 View
2001-11-08 WFEE Fee Worksheet (SB06) 1 View
2001-11-08 WCLM Claims Worksheet (PTO-2022) 1 View
2001-11-08 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
App. No.
10/005,861
Filed
2001-11-08
Pub. No.
US20030087043A1
Art Unit
1762