Patent Application
Utility
Small
App. No. 10/006,949
· Confirmation No. 2759
METHOD FOR FORMING TA2O5 DIELECTRIC LAYER USING PLASMA ENHANCED ATOMIC LAYER DEPOSITION
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-06-27 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2001-12-04 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-12-04 | SPEC |
Specification | 7 | View | |
| 2001-12-04 | CLM |
Claims | 3 | View | |
| 2001-12-04 | ABST |
Abstract | 1 | View | |
| 2001-12-04 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Kyong-Min Kim
Kyoungki-do, KOREA, REPUBLIC OF
Jong-Min Lee
Kyoungki-do, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Classification
USPC
438/758
H10P14/69393
C23C16/405
C23C16/45523
H10P14/6532
H10P14/6544
H10P14/6336
H10P14/6339
C23C16/45542
C23C16/515
C23C16/56
Prosecution
- Examiner
- LE, DUNG ANH
- Art Unit
- 2819
- Customer No.
- 4743
- Docket No.
- 29926/37959
- Confirmation No.
- 2759
Foreign Priority
2000-77835
·
2000-12-18
·
REPUBLIC OF KOREA
Publication
- Pub. No.
- US20020086476A1
- Pub. Date
- 2002-07-04
Patent Term Adjustment
0days
No related applications found.
from
SK HYNIX INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-05-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-28
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Quick Facts
- App. No.
- 10/006,949
- Filed
- 2001-12-04
- Granted
- 2003-03-25
- Pub. No.
- US20020086476A1
- Examiner
- LE, DUNG ANH
- Art Unit
- 2819
- PTA
- 0 days
External Links