IP Library › Granted Patent US 6,608,690
Granted Patent Utility
US 6,608,690 · Confirmation No. 2146

OPTICAL PROFILOMETRY OF ADDITIONAL-MATERIAL DEVIATIONS IN A PERIODIC GRATING

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 Code Description Pages PDF
2001-12-04 TRNA Transmittal of New Application 3 View
2001-12-04 ADS Application Data Sheet 2 View
2001-12-04 SPEC Specification 40 View
2001-12-04 CLM Claims 25 View
2001-12-04 ABST Abstract 1 View
2001-12-04 DRW Drawings-only black and white line drawings 13 View
2001-12-04 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,608,690
App. No.
10/007,124
Filed
2001-12-04
Granted
2003-08-19
Pub. No.
US20030103218A1
Examiner
PHAM, HOA Q
Art Unit
2877
PTA
-154 days