Method of manufacturing ferroelectric capacitor
View Patent ↗According to the present invention, a method of manufacturing a ferroelectric capacitor using a ferroelectric thin film, includes steps of: forming a lower conductive layer on a semiconductor substrate; coating solution of ferroelectric coking including organic solvent and organometallic complex on the lower conductive layer; performing a heating process for coated solution at temperature, to decompose said organometallic complex in solution of ferroelectric coking, or more and ferroelectric crystallization temperature or below to form said metal compound thin film; forming an upper conductive layer on said metal compound thin film; and performing a heating process for said metal compound thin film at ferroelectric crystallization temperature or more to form said ferroelectric thin film.
1. A method of manufacturing a ferroelectric capacitor comprising:
preparing a semiconductor substrate;
forming a lower conductive layer on the semiconductor substrate;
forming a ferroelectric film on the lower conductive layer, the forming of the ferroelectric film further including:
coating a solution including a ferroelectric material and an organic solvent on the lower conductive layer;
subjecting the coated solution to heat treatment so as to evaporate the organic solvent;
subjecting the ferroelectric material to an amorphous anneal that is not sufficient for crystallization, and
repeating the coating, the heat treatment and amorphous anneal at least one time;
subjecting the ferroelectric film to a first crystallization anneal that is sufficient for crystallization; and
forming an upper conductive layer on the ferroelectric film.
2. The method of manufacturing a ferroelectric capacitor according to claim 1 , further comprising subjecting the upper conductive layer to a second crystallization anneal.
3. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the coating is conducted by a spin coating method.
4. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the coating is conducted by a liquid source misted chemical deposition method.
5. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the heat treatment is conducted at about 120° C. to 250° C. in approximately 2 to 6 minutes.
6. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the ferroelectric material includes at least a compound selected from the group of Bi based layer compound and titanic acid zirconate.
7. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the organic solvent includes at least a solvent selected from the group of butyle acetate, 1-methoxyethanol and 2-methoxyethanol.
8. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the amorphous anneal is conducted at about 700° C. to 750° C. in approximately 30 seconds to 3 minutes.
9. The method of manufacturing a ferroelectric capacitor according to claim 1 , wherein the crystallization anneal is conducted at about 650° C. to 800° C. in approximately 30 to 120 minutes.
10. A method of manufacturing a ferroelectric capacitor comprising:
preparing a semiconductor substrate;
forming a lower conductive layer on the semiconductor substrate;
forming a stacked ferroelectric film on the lower conductive layer by repeating the following:
coating a solution including a ferroelectric material and an organic solvent on the lower conductive layer;
subjecting the coated solution to a heat treatment so as to evaporate the organic solvent, and
subjecting the ferroelectric material to an amorphous anneal so that a difference between a trough and peak formed on the ferroelectric film does not exceed a thickness of the ferroelectric film;
subjecting the ferroelectric film to a first oxidation anneal that is sufficient for crystallization; and
forming an upper conductive layer on the ferroelectric film.
11. The method of manufacturing a ferroelectric capacitor according to claim 10 , further comprising subjecting the upper conductive layer to a second oxidation anneal.
12. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the coating is conducted by a spin coating method.
13. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the coating is conducted by a liquid source misted chemical deposition method.
14. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the heat treatment is conducted at about 120° C. to 250° C. in approximately 2 to 6 minutes.
15. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the ferroelectric material includes at least a compound selected from the group of Bi based layer compound and titanic acid zirconate.
16. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the organic solvent includes at least a solvent selected from the group of butyle acetate, 1-methoxyethanol and 2-methoxyethanol.
17. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the amorphous anneal is conducted at about 700° C. to 750° C. in approximately 30 seconds to 3 minutes.
18. The method of manufacturing a ferroelectric capacitor according to claim 10 , wherein the oxidation anneal is conducted at about 650° C. to 800° C. in approximately 30 to 120 minutes.