IP Library › Granted Patent US 6,662,466
Granted Patent Utility
US 6,662,466 · Confirmation No. 1309

METHOD FOR TWO DIMENSIONAL ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2009-04-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-04-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-04-21 TRAN.LET Transmittal Letter 1 View
2009-04-21 PA.. Power of Attorney 1 View
2009-04-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2009-04-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-10-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-08 OATH Oath or Declaration filed 9 View
2001-12-11 TRNA Transmittal of New Application 2 View
2001-12-11 SPEC Specification 15 View
2001-12-11 CLM Claims 6 View
2001-12-11 ABST Abstract 1 View
2001-12-11 DRW Drawings-only black and white line drawings 10 View
2001-12-11 OATH Oath or Declaration filed 4 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,662,466
App. No.
10/013,785
Filed
2001-12-11
Granted
2003-12-16
Pub. No.
US20020112370A1
Art Unit
3749
PTA
-60 days