Patent Assignment
Reel/Frame 021360/0092
Merger
Recorded: 2008-08-08
Pages: 5
Assignor
ASML US, LLC
Executed: 2002-12-31
Assignee
ASML US, INC.
8555 SOUTH RIVER PARKWAY, TEMPE, ARIZONA, 85284
Covered Properties
(36)
Wafer Gripper
Patent:
5,700,046 →
Application:
08/527,796 →
Modular System
Patent:
5,733,024 →
Application:
08/527,797 →
Multi-Stage Telescoping Structure
Patent:
5,733,096 →
Application:
08/527,798 →
Method for Processing Flat Panel Displays and Large Wafers
Patent:
5,756,157 →
Application:
08/725,282 →
Hot Plate Oven for Processing Flat Panel Displays and Large Wafers
Patent:
6,091,056 →
Application:
08/938,396 →
Photoresist Coating Process Control with Solvent Vapor Sensor
Patent:
6,027,760 →
Application:
08/987,179 →
Method and Apparatus for Adaptive Process Control of Critical Dimensions During Spin Coating Process
Patent:
6,177,133 →
Application:
08/988,288 →
High Efficiency Photoresist Coating
Patent:
6,191,053 →
Application:
09/094,443 →
Yield and Line Width Performance for Liquid Polymers and Other Materials
Patent:
6,248,171 →
Application:
09/221,060 →
Environment Exchange Control for Material on a Wafer Surface
Patent:
6,254,936 →
Application:
09/222,117 →
Device for Handling Wafers in Microelectronic Manufacturing
Patent:
6,533,531 →
Application:
09/222,622 →
Apparatus for Processing Wafers
Patent:
6,616,394 →
Application:
09/223,111 →
Direct Skew Control and Interlock of Gantry
Patent:
6,246,203 →
Application:
09/245,445 →
Systems and Methods for Controlling Local Environment
Patent:
6,966,364 →
Application:
09/248,768 →
Plasma Deposition of Spin Chucks to Reduce Contamination of Silicon Wafers
Patent:
6,242,364 →
Application:
09/275,360 →
Method and Apparatus for Resolving Conflicts in a Substrate Processing System
Liquid Dispensing Systems and Methods
Patent:
6,322,337 →
Application:
09/360,851 →
Method of Uniformly Coating a Substrate
Patent:
6,238,735 →
Application:
09/391,964 →
Substrate Thermal Management System
Patent:
6,472,643 →
Application:
09/519,963 →
Method for Substrate Thermal Management
Patent:
6,414,276 →
Application:
09/520,077 →
Recipe Cascading in a Wafer Processing System
Patent:
6,678,572 →
Application:
09/521,026 →
Liquid dispensing systems and methods
Patent:
6,302,662 →
Application:
09/522,249 →
Method for two dimensional adaptive process control of critical dimensions during spin coating process
Patent:
6,327,793 →
Application:
09/531,912 →
Environment Exchange Control for Material on a Wafer Surface
Patent:
6,844,027 →
Application:
09/563,775 →
Environment Exchange Control for Material on a Wafer Surface
Patent:
6,468,586 →
Application:
09/566,605 →
Robot Pre-Positioning in a Wafer Processing System
Patent:
6,865,437 →
Application:
09/602,527 →
Method for an Improved Developing Process in Wafer Photolithography
Patent:
6,746,826 →
Application:
09/624,712 →
Systems and Methods for Exposing Substrate Periphery
Patent:
6,509,577 →
Application:
09/709,975 →
Yield and Line Width Performance for Liquid Polymers and Other Materials
Plasma Deposition of Spin Chucks to Reduce Contamination of Silicon Wafers
Method of Uniformly Coating a Substrate
Method for Two Dimensional Adaptive Process Control of Critical Dimensions During Spin Coating Process
Environment Exchange Control for Material on a Wafer Surface
Method and Apparatus for Resolving Conflicts in a Substrate Processing System
Method for Substrate Thermal Management
Apparatus for Processing Wafers
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 3, 2003
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 015714/0803 →
Merger & Change of Name
Feb 3, 2003
From: SILICON VALLEY GROUP, INC.; ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 015725/0023 →
Change of Name
Nov 17, 2003
From: SILICON VALLEY GROUP, INC.
To: ASML US, INC.
Reel/Frame 014822/0677 →
Change of Name
Nov 17, 2003
From: ASML USA INC.
To: ASML HOLDING N.V.
Reel/Frame 014699/0339 →
Assignment of Assignor's Interest
Nov 17, 2003
From: ASML USA INC.
To: ASML HOLDING N.V.
Reel/Frame 014699/0351 →
Assignment of Assignor's Interest
Nov 17, 2003
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014822/0856 →
Change of Name
Nov 24, 2003
From: ASML USA, INC.
To: ASML HOLDING N.V.
Reel/Frame 014815/0933 →
Assignment of Assignor's Interest
Nov 25, 2003
From: ASML USA INC.
To: ASML HOLDING N.V.
Reel/Frame 014718/0945 →
Assignment of Assignor's Interest
Nov 25, 2003
From: ASML USA INC.
To: ASML HOLDING N.V.
Reel/Frame 014724/0721 →
Change of Name & Merger
Dec 11, 2003
From: SILICON VALLEY GROUP, INC.
To: ASML US, INC.
Reel/Frame 014863/0715 →
Change of Name
Mar 3, 2004
From: SILICON VALLEY GROUP, INC.
To: ASML US, INC.
Reel/Frame 014394/0164 →
Confirmatory Assignment
Mar 8, 2004
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014402/0700 →
Assignment of Assignor's Interest
Jul 6, 2004
From: ASML USA, INC.
To: ASML HOLDING N.V.
Reel/Frame 014815/0851 →
Merger and Change of Name
Jul 13, 2004
From: SILICON VALLEY GROUP, INC. (CHANGE OF NAME); ASML, US, INC. (MERGER)
To: ASML US, INC., A CORP. OF DELAWARE
Reel/Frame 014852/0001 →
Confirmatory Assignment
Jul 13, 2004
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014845/0993 →
Merger
Jul 19, 2004
From: SILICON VALLEY GROUP, INC. (CHANGE OF NAME); ASML US, INC. (MERGER)
To: ASML US, INC., A CORPORATION OF DELAWARE
Reel/Frame 014863/0689 →
Confirmatory License
Jul 19, 2004
From: ASML US, INC.
To: ASML HOLDINGS N.V.
Reel/Frame 014867/0974 →
Assignment of Assignor's Interest
Aug 24, 2004
From: ASML US, INC. (CONFIRMATORY ASSIGNMENT)
To: ASML HOLDING N.V.
Reel/Frame 016414/0434 →
Confirmatory License
Sep 27, 2004
From: ASML US, INC.
To: ASML HOLDING N.V., A NETHERLAND CORPORATION
Reel/Frame 015841/0376 →
Security Agreement
Mar 3, 2006
From: CONFIRMA, INC.
To: COMERICA BANK
Reel/Frame 017240/0812 →
Corrected Cover Sheet to Correct Assignee Name to Read Asml Holding N.V.
Feb 26, 2007
From: ASML US, INC.
To: ASML HOLDING N.V., A NETHERLANDS CORPORATION
Reel/Frame 018961/0470 →
Merger
Aug 8, 2008
From: SVG LITHOGRAPHY SYSTEMS, INC.
To: ASML US, INC.
Reel/Frame 021360/0189 →
Change of Name
Aug 8, 2008
From: SILICON VALLEY GROUP, INC.
To: ASML US, INC.
Reel/Frame 021360/0168 →
Change of Name
Aug 8, 2008
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 021360/0088 →
Assignment of Assignor's Interest
Oct 23, 2008
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 021719/0548 →