Plasma deposition of spin chucks to reduce contamination of Silicon wafers
View Patent ↗An apparatus for delivering a fluidic media to a wafer includes a housing defining a process chamber. A fluidic media delivery member is coupled to the process chamber. A rotatable chuck is positioned in the process chamber. The rotatable chuck has a wafer support surface coated with a coating material. A vacuum supply line is coupled to the rotatable chuck.
1. An apparatus for delivering media to a wafer, comprising:
a housing defining a process chamber;
a spin chuck positioned in the process chamber, the spin chuck having a wafer support surface, the wafer support surface coated with a coating layer such that at least a portion of a particulate matter on the wafer support surface is encapsulated by the coating layer; and
a skirt positioned at a periphery and in a non-planer relationship to the wafer support surface such that a magnitude of radial thermal gradients in a wafer positioned on the spin chuck is reduced, wherein a lateral edge of the skirt contacts a lateral edge of the wafer support surface, is in non-mechanical supporting position relative to the wafer and is sized to permit a wafer positioned on the wafer support surface to extend beyond a periphery of the skirt.
2. An apparatus of claim 1 , wherein the coating layer is comprised of a dielectric coating material.
3. The apparatus of claim 1 , wherein the coating layer has a composition including a substance from the chemical family SiO x CH y , with x ranging from 1-2, inclusive, and y ranging from 0-3, inclusive.
4. The apparatus of claim 1 , wherein the coating layer material has a mechanical hardness equal to hardness coatinglayer , and silicon has a mechanical hardness equal to hardness silicon , and wherein hardness coatinglayer is less than hardness silicon .
5. The apparatus of claim 4 wherein the mechanical hardness of the coating layer is sufficient to reduce a transfer of material from the wafer support surface to wafer.
6. The apparatus of claim 1 , wherein the coating layer has a thickness in the range of 0.5-100 micrometers.
7. The apparatus of claim 1 , wherein the skirt and wafer support surface are sized to be at least equal to a size of a wafer positioned on the wafer support surface.
8. The apparatus of claim 1 wherein the wafer support surface has formed thereon a plurality of non-planar wafer contact points.
9. The apparatus of claim 1 wherein the coating layer promotes a cross-linking of a material comprising the wafer support surface.
10. An apparatus of claim 1 wherein the wafer support surface includes a line contact vacuum ring.
11. The apparatus of claim 10 wherein the wafer support surface has formed thereon plurality of non-planar wafer contact points.