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App. No. 10/021,372 · Confirmation No. 3268

Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring

Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-10-30 TRNA Transmittal of New Application 4 View
2001-10-30 A.PE Preliminary Amendment 6 View
2001-10-30 SPEC Specification 33 View
2001-10-30 CLM Claims 7 View
2001-10-30 ABST Abstract 1 View
2001-10-30 DRW Drawings-only black and white line drawings 24 View
2001-10-30 OATH Oath or Declaration filed 10 View
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Quick Facts
App. No.
10/021,372
Filed
2001-10-30
Pub. No.
US20020173242A1
Art Unit
3724