IP Library › Assignment 015661/0092
Patent Assignment
Reel/Frame 015661/0092

Assignment of Assignor's Interest

Recorded: 2004-08-09 Pages: 5
Assignor
MITSUBISHI MATERIALS CORPORATION
Executed: 2004-01-14
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Properties (11)
Floating Subcarriers for Wafer Polishing Apparatus
Patent: 4,918,870 →
Application: 06/864,282 →
Wafer Polisher Head Having Floating Retainer Ring
Patent: 5,205,082 →
Application: 07/811,568 →
Rotary Union for Couupling Fluids in a Wafer Polishing Apparatus
Patent: 5,443,416 →
Application: 08/119,972 →
Wafer Polisher Head Adapted for Easy Removal of Wafers
Patent: 5,527,209 →
Application: 08/449,556 →
Chemical Mechanical Polishing Head Assembly Having Floating Wafer Carrier and Retaining Ring
Patent: 6,231,428 →
Application: 09/261,112 →
Chemical Mechanical Polishing Head Having Floating Wafer Retaining Ring and Wafer Carrier with Multi-Zone Polishing Pressure Control
Patent: 6,309,290 →
Application: 09/294,547 →
Structure and Method for Three Chamber Cmp Polishing Head
Patent: 6,068,549 →
Application: 09/363,980 →
Apparatus and Method for Chemical-Mechanical Polishing (Cmp) Head Having Direct Pneumatic Wafer Polishing Pressure
Patent: 6,368,189 →
Application: 09/390,142 →
System and Method for End-Point Detection in a Multi-Head Cmp Tool Using Real-Time Monitoring of Motor Current
Patent: 6,293,845 →
Application: 09/391,073 →
Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
Application: 10/021,372 →
Publication: US 2002/0173242
Apparatus for Chemical-Mechanical Polishing (Cmp) Head Having Direct Pneumatic Wafer Polishing Pressure
Patent: 7,029,382 →
Application: 10/027,935 →
Publication: US 2002/0077045
Related Assignments (2)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Sep 19, 1996
From: CYBEQ SYSTEMS
To: CYBEQ NANO TECHNOLOGIES, INC.
Reel/Frame 008162/0105 →
Assignment of Assignor's Interest Aug 9, 2004
From: MALONEY, GERARD S.; PRICE, JASON; CHIN, SCOTT; KAJIWARA, JIRO
To: MITSUBISHI MATERIALS CORPORATION
Reel/Frame 015662/0547 →