Granted Patent
Utility
US 5,443,416 · App. 08/119,972
Rotary union for coupling fluids in a wafer polishing apparatus
Inventors:
Konstantine Volodarsky, Jiro Kajiwara, Herbert W. Owens, Jr., Jan H. King
Patented Case
View Patent ↗
Granted: Aug 22, 1995
Filed: Sep 9, 1993
Inventors
Konstantine Volodarsky
Jiro Kajiwara
Herbert W. Owens, Jr.
Jan H. King
Assignee (at issue)
Cybeq Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.