Granted Patent
Utility
US 6,231,428 · App. 09/261,112
Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
Inventors:
Gerard S. Maloney, Scott Chin, John Geraghty, William Dyson, Jr., Tanlin Dickey
Patented Case
View Patent ↗
Granted: May 15, 2001
Filed: Mar 3, 1999
Inventors
Gerard S. Maloney
Scott Chin
John Geraghty
William Dyson, Jr.
Tanlin Dickey
Assignee (at issue)
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.