IP Library › Granted Patent US 6,737,208
Granted Patent Utility
US 6,737,208 · Confirmation No. 2751

METHOD AND APPARATUS FOR CONTROLLING PHOTOLITHOGRAPHY OVERLAY REGISTRATION INCORPORATING FEEDFORWARD OVERLAY INFORMATION

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2004-02-17 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-01-07 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-07 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-01-07 1449 List of References cited by applicant and considered by examiner 1 View
2004-01-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-07 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-17 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-11-17 FOR Foreign Reference 22 View
2003-10-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-10-08 SPEC Specification 1 View
2003-10-08 CLM Claims 8 View
2003-10-08 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-07-08 CTRS Requirement for Restriction/Election 5 View
2003-07-08 892 List of references cited by examiner 1 View
2003-05-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-05-01 CTRS Requirement for Restriction/Election 4 View
2002-11-15 C.AD Change of Address 1 View
2002-07-09 LET. Miscellaneous Incoming Letter 1 View
2001-12-17 TRNA Transmittal of New Application 3 View
2001-12-17 SPEC Specification 20 View
2001-12-17 CLM Claims 8 View
2001-12-17 ABST Abstract 1 View
2001-12-17 DRW Drawings-only black and white line drawings 3 View
2001-12-17 OATH Oath or Declaration filed 3 View
2001-12-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-12-17 SRFW Search information including classification, databases and other search related notes 1 View
2001-12-17 FWCLM Index of Claims 1 View
2001-12-17 TRNA Transmittal of New Application 3 View
2001-12-17 DRW Drawings-only black and white line drawings 3 View
2001-12-17 SPEC Specification 20 View
2001-12-17 CLM Claims 8 View
2001-12-17 ABST Abstract 1 View
2001-12-17 OATH Oath or Declaration filed 3 View
2001-12-17 WFEE Fee Worksheet (SB06) 1 View
2001-12-17 WFEE Fee Worksheet (SB06) 1 View
2001-12-17 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,737,208
App. No.
10/022,488
Filed
2001-12-17
Granted
2004-05-18
Art Unit
1756
PTA
-40 days