IP Library Patent Application 10025182
Patent Application Utility Small
App. No. 10/025,182 · Confirmation No. 6379

Method for fabricating a through-wafer optical MEMS device having an anti-reflective coating

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2001-12-19 TRNA Transmittal of New Application 5 View
2001-12-19 SPEC Specification 26 View
2001-12-19 CLM Claims 4 View
2001-12-19 ABST Abstract 1 View
2001-12-19 DRW Drawings-only black and white line drawings 7 View
2001-12-19 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/025,182
Filed
2001-12-19
Pub. No.
US20030021004A1
Art Unit
2873