Light probe microscope including picture signal processing means
View Patent ↗A light probe microscope has a probe having a tip, a mechanism for positioning the probe tip closely to a sample surface and causing two-dimensional scanning movement between the probe tip and the sample, a light source for emitting light to an area proximate the probe tip and the sample, a two-dimensional image sensor for receiving the light radiated from the sample and producing a two-dimensional image of the sample in accordance therewith, and a device for producing a light image based on a signal intensity of light in a detection region of the two-dimensional image.
1. A light probe microscope comprising:
a probe having a tip portion and being capable of generating a light field in a vicinity of the tip portion;
probe position detecting means for detecting a distance between the tip portion of the probe and a sample surface;
control means for controlling the distance between the tip portion and the sample surface;
scan means for two-dimensionally scanning the probe with respect to the sample surface;
a light source for generating light used to produce the light field;
a converging optical system for converging light radiated from the sample surface in response to the light field;
a two-dimensional image sensor for producing a two-dimensional shape image of the sample surface in real time; and
picture signal processing means for producing a two-dimensional light image in accordance with a signal intensity of a detection region in the two-dimensional shape image.
2. A light probe microscope according to claim 1 ; further comprising a spectroscope interposed between the radiated light and the two-dimensional image sensor for selectively obtaining a light signal of a specified wavelength.
3. A light probe microscope according to claim 1 ; wherein the converging optical system comprises a polarizer and a mirror arranged such that different polarization components of the radiated light form images in separate positions on the two-dimensional image sensor.
4. A light probe microscope according to claim 1 ; wherein the converging optical system comprises a dichroic mirror and another mirror arranged such that different wavelength components of the radiated light form images in separate positions on the two-dimensional image sensor.
5. A light probe microscope according to claim 1 ; wherein the picture signal processing means includes means for obtaining a signal intensity of a plurality of separate detection regions in the two-dimensional shape image and producing light images corresponding to the respective detection regions.
6. A light probe microscope according to claim 2 ; wherein the picture signal processing means includes means for obtaining a signal intensity of a plurality of separate detection regions in the two-dimensional shape image and producing light images corresponding to the respective detection regions.
7. A light probe microscope according to claim 3 ; wherein the picture signal processing means includes means for obtaining a signal intensity of a plurality of separate detection regions in the two-dimensional shape image and producing light images corresponding to the respective detection regions.
8. A light probe microscope according to claim 4 ; wherein the picture signal processing means includes means for obtaining a signal intensity of a plurality of separate detection regions in the two-dimensional shape image and producing light images corresponding to the respective detection regions.
9. A light probe microscope according to claim 1 ; wherein the two-dimensional shape image is a video signal, and is updated at a video rate.
10. A light probe microscope according to claim 1 ; further comprising data collecting means for obtaining the two-dimensional shape image and the two-dimensional light image; wherein the picture signal processing means includes means for digitizing a video signal, calculating a light intensity of the detection region, and transmitting the calculated light intensity to the data collecting means as a digital or analog value.
11. A light probe microscope according to claim 1 ; further comprising data collecting means for obtaining the two-dimensional shape image and the two-dimensional light image; and an external data collecting unit separate from the data collecting means for obtaining a picture synchronized with the shape image in accordance with data containing a trigger signal output by the data collecting means.
12. A light probe microscope according to claim 5 ; wherein the picture signal processing means includes means for obtaining a light image for all wavelength components of the light probe microscope by setting a detection region for each of the wavelength components.
13. A light probe microscope according to claim 6 ; wherein the picture signal processing means includes means for obtaining a light image for all wavelength components of the light probe microscope by setting a detection region for each of the wavelength components.
14. A light probe microscope according to claim 7 ; wherein the picture signal processing means includes means for obtaining a light image for all wavelength components of the light probe microscope by setting a detection region for each of the wavelength components.
15. A light probe microscope according to claim 8 ; wherein the picture signal processing means includes means for obtaining a light image for all wavelength components of the light probe microscope by setting a detection region for each of the wavelength components.
16. A light probe microscope according to claim 12 ; further comprising means for extracting a light spectrum from the light image at a measuring point in a scan region of the sample for plural wavelength components by continuously varying the spectrum in a wavelength axis direction.
17. A light probe microscope according to claim 13 ; further comprising means for extracting a light spectrum from the light image at a measuring point in a scan region of the sample for plural wavelength components by continuously varying the spectrum in a wavelength axis direction.
18. A light probe microscope according to claim 14 ; further comprising means for extracting a light spectrum from the light image at a measuring point in a scan region of the sample for plural wavelength components by continuously varying the spectrum in a wavelength axis direction.
19. A light probe microscope according to claim 15 ; further comprising means for extracting a light spectrum from the light image at a measuring point in a scan region of the sample for plural wavelength components by continuously varying the spectrum in a wavelength axis direction.
20. A light probe microscope according to claim 5 ; further comprising a spectroscope for setting a wavelength of excited light at the probe tip outside an image region of the two-dimensional image sensor so that an S/N ratio to a wavelength other than the excited light is improved.
21. A light probe microscope according to claim 6 ; further comprising a spectroscope for setting a wavelength of excited light at the probe tip outside an image region of the two-dimensional image sensor so that an S/N ratio to a wavelength other than the excited light is improved.
22. A light probe microscope according to claim 7 ; further comprising a spectroscope for setting a wavelength of excited light at the probe tip outside an image region of the two-dimensional image sensor so that an S/N ratio to a wavelength other than the excited light is improved.
23. A light probe microscope according to claim 8 ; further comprising a spectroscope for setting a wavelength of excited light at the probe tip outside an image region of the two-dimensional image sensor so that an S/N ratio to a wavelength other than the excited light is improved.
24. A light probe microscope according to claim 1 ; wherein the converging optical system is arranged to converge one of light that has been transmitted through the sample or reflected by the sample.
25. A light probe microscope according to claim 1 ; wherein the converging optical system is arranged to converge light that has passed through an optical aperture of the probe.
26. A light probe microscope according to claim 1 ; wherein an image at a selected portion of the two-dimensional image sensor is continuously preserved in accordance with a trigger signal.
27. A light probe microscope comprising: a probe having a tip; means for positioning the probe tip closely to a sample surface and causing two-dimensional scanning movement between the probe tip and the sample; a light source for emitting light to an area proximate the probe tip and the sample; a two-dimensional image sensor for receiving the light radiated from the sample and producing a two-dimensional image of the sample in accordance therewith; and means for producing a light image based on a signal intensity of light in a detection region of the two-dimensional image.
28. A light probe microscope according to claim 26 ; further comprising a spectroscope interposed between the sample and the two-dimensional image sensor for selectively obtaining a light signal of specified wavelength.
29. A light probe microscope according to claim 27 ; further comprising an optical system for converging light emitted by the sample surface in response to the emitted light.
30. A light probe microscope according to claim 29 ; wherein the optical system comprises a polarizer and a mirror arranged such that different polarization components of the converged light form images in separate positions on the two-dimensional image sensor.
31. A light probe microscope according to claim 29 ; wherein the optical system comprises a dichroic mirror and another mirror arranged such that different wavelength components of the converged light form images in separate positions on the two-dimensional image sensor.
32. A light probe microscope according to claim 27 ; wherein the means for producing the two-dimensional light image includes means for obtaining a signal intensity of a plurality of separate detection regions in the two-dimensional image and producing light images corresponding to the respective detection regions.