Patent Assignment
Reel/Frame 033817/0078
Change of Name
Recorded: 2014-09-25
Pages: 22
Assignor
SII NANOTECHNOLOGY INC.
Executed: 2013-01-01
Assignee
HITACHI HIGH-TECH SCIENCE CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, TOKYO, 105-0003, JAPAN
Covered Properties
(209)
Radial Differential Squid Magnetic Flux Meter
Patent:
5,825,183 →
Application:
08/635,034 →
Method of Controlling Probe Microscope
Patent:
5,955,660 →
Application:
08/763,674 →
Scanning Type Near Field Interatomic Force Microscope
Patent:
5,939,623 →
Application:
08/764,214 →
Scanning Probe Microscope and Semiconductor Distortion Sensor for Use Therein
Patent:
6,049,115 →
Application:
08/842,845 →
Micro Fluorescent X-Ray Analyzer
Patent:
5,937,026 →
Application:
08/872,430 →
Ion Beam Machining Method and Device Thereof
Patent:
5,854,488 →
Application:
08/879,342 →
Probe Scanning Apparatus for Probe Microscope
Patent:
5,965,885 →
Application:
08/968,193 →
Cantilever Probe and Scanning Type Probe Microscope Utilizing the Cantilever Probe
Patent:
5,992,225 →
Application:
08/987,734 →
Electron Beam Device
Patent:
6,037,589 →
Application:
09/008,161 →
Superconducting Quantum Interference Device Having Bias Wiring Layer.
Patent:
6,285,186 →
Application:
09/027,093 →
Scanning Probe Microscope Having Quartz Oscillator for Controlling Position of Probe
Patent:
6,201,227 →
Application:
09/057,349 →
X-Ray Fluorescence Analyzer Capable of Determining the Center of a Sample
Patent:
6,115,450 →
Application:
09/057,422 →
Inductively Coupled Plasma Mass Spectrometric and Spectrochemical Analyzer
Patent:
6,002,129 →
Application:
09/078,470 →
Scanning Probe Microscope
Patent:
6,242,736 →
Application:
09/116,319 →
Sampling Scanning Probe Microscope and Sampling Method Thereof
Patent:
6,094,972 →
Application:
09/123,146 →
Three-Dimensional Scanning Probe Microscope
Patent:
6,215,121 →
Application:
09/124,128 →
Semiconductor Strain Sensor and Scanning Probe Microscope Using the Semiconductor Strain Sensor
Patent:
6,211,540 →
Application:
09/173,035 →
Self-Detecting Type of Spm Probe and Spm Device
Patent:
6,388,252 →
Application:
09/197,584 →
Cantilever Unit and Scanning Probe Microscope Utilizing the Cantilever Unit.
Patent:
6,176,122 →
Application:
09/197,587 →
Viscoelasticity Measurement Apparatus
Patent:
6,205,862 →
Application:
09/199,239 →
High-Speed Thermal Analyzer
Patent:
6,210,035 →
Application:
09/200,311 →
Surface Analyzing Apparatus
Patent:
6,259,093 →
Application:
09/201,182 →
Differential Scanning Calorimeter
Patent:
6,422,742 →
Application:
09/204,650 →
Focused Ion Beam Lithography Method with Sample Inspection Through Oblique Angle Tilt
Patent:
6,146,797 →
Application:
09/204,894 →
Focused Ion Beam Machining Method and Device Thereof
Patent:
6,300,628 →
Application:
09/207,823 →
Scanning Electronic Microscope and Method for Automatically Observing Semiconductor Wafer
Patent:
6,399,953 →
Application:
09/227,231 →
Differential Thermal Analyzer
Patent:
6,146,012 →
Application:
09/232,472 →
Method of Observing Secondary Ion Image by Focused Ion Beam
Patent:
6,177,670 →
Application:
09/235,667 →
In-Line Fluorescent X-Ray Film Thickness Monitor
Patent:
6,175,612 →
Application:
09/243,919 →
Scanning Probe Microscope and Method of Measuring Geometry of Sample Surface with Scanning Probe Microscope
Patent:
6,499,340 →
Application:
09/252,397 →
Focused Ion Beam System
Patent:
6,225,627 →
Application:
09/264,142 →
Section Formation Observing Method
Patent:
6,331,712 →
Application:
09/271,805 →
Portable-Type Fluorescent X-Ray Analyzer
Patent:
6,178,227 →
Application:
09/293,091 →
Method for Sharpening a Probe
Patent:
6,280,647 →
Application:
09/310,268 →
Coordinating Optical Type Observing Apparatus and Laser Marking Method
Patent:
6,303,930 →
Application:
09/310,766 →
Focused Ion Beam Apparatus
Patent:
6,348,689 →
Application:
09/310,767 →
Charged Particle Apparatus
Patent:
6,452,173 →
Application:
09/315,717 →
Differential Scanning Calorimeter Having Low Drift and High Response Characteristics
Patent:
6,530,686 →
Application:
09/319,624 →
Probe for Scanning Probe Microscope (Spm) and Spm Device
Patent:
6,383,823 →
Application:
09/328,139 →
Scanning Probe Microscope Having Piezoelectric Member for Controlling Movement of Probe
Patent:
6,257,053 →
Application:
09/337,613 →
Scanning Probe and Scanning Probe Microscope
Patent:
6,239,426 →
Application:
09/348,319 →
Heat Flux Type Differential Scanning Calorimeter
Patent:
6,390,669 →
Application:
09/351,504 →
Radioactive Ray Detecting Device
Patent:
6,281,497 →
Application:
09/351,506 →
Fluorescent X-Ray Analyzer
Patent:
6,295,333 →
Application:
09/359,938 →
Observing/Forming Method with Focused Ion Beam and Apparatus Therefor
Patent:
6,281,496 →
Application:
09/360,775 →
Thermal Analyzing Apparatus
Patent:
6,250,799 →
Application:
09/482,805 →
Thermal Analysis Apparatus and Method Capable of Accurately Measuring a Temperature of a Large Diameter Sample
Patent:
6,390,674 →
Application:
09/482,807 →
Scanning Probe Microscope
Patent:
6,593,571 →
Application:
09/483,727 →
Fluorescent X-Ray Analysis Apparatus
Patent:
6,850,593 →
Application:
09/531,660 →
Fluorescent X-Ray Method for Determining X-Ray Alignment by Luminescent Changes
Patent:
6,404,846 →
Application:
09/531,662 →
Wafer Inspecting Apparatus
Patent:
6,724,929 →
Application:
09/537,945 →
Slight Amount Sample Analyzing Apparatus
Patent:
6,539,075 →
Application:
09/546,765 →
Thermal Analysis Apparatus
Patent:
6,402,370 →
Application:
09/558,616 →
Dynamic viscoelasticity measuring system
Patent:
6,386,045 →
Application:
09/670,654 →
Liquid Metal Ion Source and Method for Measuring Flow Impedance of Liquid Metal Ion Source
Patent:
6,472,881 →
Application:
09/673,941 →
Thermal Analysis Apparatus
Electron Beam Apparatus
Method for Observing Cross-Sectional Structure of Sample
Ion Beam Processing Position Correction Method
Probe Scanning Method
Calorimeter and Manufacturing Method Thereof
Optical Fiber Probe and Cantilever with Microscopic Aperture, and Method of Forming Microscopic Openings
Microprobe and Sample Surface Measuring Apparatus
Method of Forming Tunnel Oxide Film for Superconducting X-Ray Sensor Element
Patent:
6,379,986 →
Application:
09/778,462 →
Microprobe and Scanning Probe Apparatus Having Microprobe
X-Ray Fluorescence Analysis Apparatus
Open Chamber-Type X-Ray Analysis Apparatus
Portable X-Ray Fluorescence Analyzer
Network System for Controlling Independent Access to Stored Data Among Local Area Networks
Patent:
7,020,152 →
Application:
09/830,382 →
Thermal Analysis Apparatus
Icp Analyzer
Surface Analyzing Apparatus
Energy Dispersive X-Ray Analyzer
X-Ray Fluorescence Thickness Tester
X-Ray Fluorescence Analyzer
X-Ray Fluorescence Thickness Measurement Device
Energy Dispersion-Type X-Ray Detection System
Electromagnetic Field Superimposed Lens and Electron Beam Device Using This Electromagnetic Field Superimposed Lens
Method for Forming a Vertical Edge Submicron Through-Hole and a Thin Film Sample with This Kind of Through-Hole
Beam Shaped Film Pattern Formation Method
Automatic Humidity Step Control Thermal Analysis Apparatus
Derived Data Display Adjustment System
Tem Sample Slicing Process
Method of Operating Scanning Probe Microscope
Scanning Electronic Beam Apparatus
Signal Detector Using Superconducting Quantum Interference Device and Measuring Method Therefore
Light Probe Microscope
Mask Defect Repair Method
Focused Ion Beam Apparatus
User Friendly Analysis System
Specimen Analyzing Method
Method and Apparatus of Evaluating Layer Matching Deviation Based on Cad Information
Pattern Measuring Method and Measuring System Using Display Microscope Image
Combined X-Ray Analysis Apparatus
X-Ray Mapping Analysis Method
Calorimeter
Scanning Microscope with Brightness Control
Scanning Atom Probe
Apparatus and Method for Measuring Thickness and Composition of Multi-Layered Sample
Method and Apparatus for Manufacturing Ultra Fine Three-Dimensional Structure
Thermogravimetry Apparatus
Probe for Scanning Probe Microscope
Heated Self-Detecting Type Cantilever for Atomic Force Microscope
Calorimeter
Radiation Detector
Electron Beam Apparatus
Electron Beam Apparatus
Radiation Detector
Ion Beam Device and Ion Beam Processing Method, and Holder Member
Ion Beam Device and Ion Beam Processing Method
Ion Beam Processing Method
Method of Making Lamina Specimen
Atom Probe Apparatus and Method for Working Sample Preliminarily for the Same
Fine Stencil Structure Correction Device
Ion Beam Apparatus, Ion Beam Processing Method and Sample Holder Member
Patent:
6,838,685 →
Application:
10/629,217 →
Apparatus for Processing and Observing a Sample
Analysis Apparatus and Analysis Method
Calorimeter and Manufacturing Method Thereof
Method of Manufacturing the Multi-Tip Probe, a Multi-Tip Probe, and Surface Characteristic Analysis Apparatus
Scanning Probe Microscope and Operation Method
Method of Manufacturing Light-Propagating Probe for Near-Field Microscope
Method and System for Fabricating Three-Diemensional Microstructure
Photomask Correction Method Using Composite Charged Particle Beam, and Device Used in the Correction Method
Electrical Property Evaluation Apparatus
Method and Apparatus of Evaluating Layer Matching Deviation Based on Cad Information
Tem Sample Equipped with an Identifying Function, Focused Ion Beam Device for Processing Tem Sample, and Transmission Electron Microscope
Scanning Probe Microscope
Micro-Sample Pick-Up Apparatus and Micro-Sample Pick-Up Method
Thin Specimen Producing Method and Apparatus
Electron Beam Processing Method
Viscoelasticity Measuring Instrument
Scanning Probe Microscope and Scanning Method
Cooling Mechanism, Cooling Apparatus Having Cooling Mechanism, and Thermal Analyzer Equipped with Cooling Apparatus
X-Ray Analyzer for Analyzing Plastics
Method for Fabricating Nanometer-Scale Structure
Manipulator Needle Portion Repairing Method
Thermal Analyzer with Gas Mixing Chamber
Differential Scanning Calorimeter with a Second Heater
Superconducting X-Ray Detection Apparatus and Superconducting X-Ray Analyzer Using the Apparatus
Fine-Adjustment Mechanism for Scanning Probe Microscopy
Gas Blowing Nozzle of Charged Particle Beam Apparatus and Charged Particle Beam Apparatus as Well as Working Method
Scanning Probe Microscopy System and Method of Measurement by the Same
Fib-Sem Complex Apparatus
Image Noise Removing Method in Fib/Sem Complex Apparatus
Processing Probe
Scanning Probe Microscope
Scratch Repairing Processing Method and Scanning Probe Microscope (Spm) Used Therefor
Scanning Probe Microscope and Measuring Method by Means of the Same
Scanning Probe Device and Processing Method by Scanning Probe
Photomask Defect Correction Method Employing a Combined Device of a Focused Electron Beam Device and an Atomic Force Microscope
Probe for Near-Field Microscope, the Method for Manufacturing the Probe and Scanning Probe Microscope Using the Probe
Scanning Probe Microscopy Cantilever Holder and Scanning Probe Microscope Using the Cantilever Holder
Method of Approaching Probe and Apparatus for Realizing the Same
Probe Microscope System Suitable for Observing Sample of Long Body
Surface Information Measuring Apparatus and Surface Information Measuring Method
Surface Characteristic Analysis Apparatus
Method and Apparatus for Specifying Working Position on a Sample and Method of Working the Sample
Nanobio Device of Imitative Anatomy Structure
Sample Support Prepared by Semiconductor Silicon Process Technique
Sample Height Regulating Method, Sample Observing Method, Sample Processing Method and Charged Particle Beam Apparatus
Working Method Using Scanning Probe
Cantilever Holder and Scanning Probe Microscope
Optical Axis Adjusting Mechanism for X-Ray Lens, X-Ray Analytical Instrument, and Method of Adjusting Optical Axis of X-Ray Lens
Processing Apparatus Using Focused Charged Particle Beam
Charged Particle Beam Apparatus
Vibration-Type Cantilever Holder and Scanning Probe Microscope
Thermal Analysis Equipment
Superconducting X-Ray Detector and X-Ray Analysis Apparatus Using the Same
Working Method Utilizing Irradiation of Charged Particle Beam Onto Sample Through Passage in Gas Blowing Nozzle
Superconducting Radiometry Apparatus
Piezoelectric Actuator and Scanning Probe Microscope Using the Same
Scanning Probe Microscope
Working Method by Focused Ion Beam and Focused Ion Beam Working Apparatus
Sample Preparing Device and Sample Posture Shifting Method
Charged Particle Beam Apparatus and Method Adjusting Axis of Aperture
Composite Charged Particle Beam Apparatus, Method of Processing a Sample and Method of Preparing a Sample for a Transmission Electron Microscope Using the Same
Circular Cylinder Type Piezoelectric Actuator and Piezoelectric Element and Scanning Probe Microscope Using Those
Conductivity Measuring Apparatus and Conductivity Measuring Method
Charged Particle Beam Apparatus
Section Processing Method and Its Apparatus
Method for Fabricating Euvl Mask
Charged Particle Beam Apparatus and Method of Adjusting Charged Particle Optics
Cantilever, Cantilever System, Scanning Probe Microscope, Mass Sensor Apparatus, Viscoelasticity Measuring Instrument, Manipulation Apparatus, Displacement Determination Method of Cantilever, Vibration Method of Cantilever and Deformation Method of Cantilever
Self Displacement Sensing Cantilever and Scanning Probe Microscope
Differential Scanning Calorimeter
Composite Focused Ion Beam Device, and Processing Observation Method and Processing Method Using the Same
Photomask Defect Correcting Method and Device
Composite Focused Ion Beam Device, Process Observation Method Using the Same,and Processing Method
X-Ray Inspection Device and X-Ray Inspection Method
Softening Point Measuring Apparatus and Thermal Conductivity Measuring Apparatus
Thermal Analysis Apparatus
Electron Microscope and Specimen Analyzing Method
Defect Repair Apparatus and Method for Euv Mask Using a Hydrogen Ion Beam
Focused ion beam apparatus
X-Ray Transmission Inspection Apparatus and X-Ray Transmission Inspection Method
Composite charged particle beam apparatus and sample processing and observing method
Sample Processing and Observing Method
Thermal analyzer
Focused ion beam apparatus
Charged Particle Beam Apparatus and Sample Processing Method
Friction Force Microscope
Displacement Detection Mechanism and Scanning Probe Mircoscope Using the Same
Method of Measuring Vibration Characteristics of Cantilever
X-Ray Analyzer and X-Ray Analysis Method
Transmission X-Ray Analyzer and Transmission X-Ray Analysis Method
Photomask Defect Correcting Method and Device
Composite Charged Particle Beam Apparatus
Composite Charged Particle Beam Apparatus
Nitrogen Ions from a Gas Field Ion Source Held at a Pressure of 1.0 X 10^(-6) Pa to 1.0 X 10^(-2) Pa