IP Library › Granted Patent US 6,215,121
Granted Patent Utility
US 6,215,121 · App. 09/124,128

Three-dimensional scanning probe microscope

Inventors: Masamichi Fujihira, Masatoshi Yasutake, Tatsuya Miyatani, Toshihiko Sakuhara, Kazutoshi Watanabe
Patented Case View Patent ↗
Granted: Apr 10, 2001 Filed: Jul 29, 1998
Inventors
Masamichi Fujihira
Masatoshi Yasutake
Tatsuya Miyatani
Toshihiko Sakuhara
Kazutoshi Watanabe
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,215,121
App. No.
09/124,128
Filed
1998-07-29
Granted
2001-04-10
Kind
A