IP Library Granted Patent US 6,593,583
Granted Patent Utility
US 6,593,583 · Confirmation No. 2953

ION BEAM PROCESSING POSITION CORRECTION METHOD

Inventor: Kouji Iwasaki
⬇ PDF
Code Description Pages PDF
2001-03-22 SPEC Specification 18 View
2001-03-22 DRW Drawings-only black and white line drawings 3 View
2001-01-04 TRNA Transmittal of New Application 3 View
2001-01-04 SPEC Specification 10 View
2001-01-04 CLM Claims 1 View
2001-01-04 ABST Abstract 1 View
2001-01-04 DRW Drawings-only black and white line drawings 3 View
2001-01-04 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,593,583
App. No.
09/754,649
Filed
2001-03-22
Effective Filing
2001-01-04
Granted
2003-07-15
Pub. No.
US20010032936A1
Art Unit
2881
PTA
-82 days