Granted Patent
Utility
US 6,757,875 · App. 10/147,417
Method and apparatus of evaluating layer matching deviation based on CAD information
Inventor:
Ryoichi Matsuoka
Patented Case
View Patent ↗
Granted: Jun 29, 2004
Filed: May 16, 2002
Inventor
Ryoichi Matsuoka
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.