IP Library › Granted Patent US 6,544,897
Granted Patent Utility
US 6,544,897 · Confirmation No. 3382

METHOD FOR FORMING A VERTICAL EDGE SUBMICRON THROUGH-HOLE AND A THIN FILM SAMPLE WITH THIS KIND OF THROUGH-HOLE

Inventor: Takashi Kaito
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-10-26 TRNA Transmittal of New Application 3 View
2001-10-26 SPEC Specification 7 View
2001-10-26 CLM Claims 1 View
2001-10-26 ABST Abstract 1 View
2001-10-26 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
Patent No.
US 6,544,897
App. No.
10/001,332
Filed
2001-10-26
Granted
2003-04-08
Pub. No.
US20020081507A1
Art Unit
2812
PTA
-118 days